Перегляд за автором "Sleptsov, V.V."

Результати 1-4 з 4

Control of planar magnetron sputtering system operating modes by additional anode magnetic field

Bizyukov, A.A.; Girka, O.I.; Sereda, K.N.; Sleptsov, V.V.; Chunadra, A.G. (2010)

The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering ...
High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge

Bizyukov, A.A.; Sereda, K.N.; Sleptsov, V.V.; Tarasov, I.K.; Chunadra, A.G. (Вопросы атомной науки и техники, 2012)

In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using ...
Ion beam system for nanotrimming of functional microelectronics layers

Bizyukov, A.A.; Bizyukov, I.A.; Girka, O.I.; Sereda, K.N.; Sleptsov, V.V.; Gutkin, M.; Mishin, S. (Вопросы атомной науки и техники, 2011)

This paper concerns with investigation of the trimming process which uses ion beam etching for high-precision adjustment of the thickness of functional microelectronics layers. The layer deposited on the substrate is ...
TiN coating etching from a surface of the instrument in beam-plasma system

Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N.; Sleptsov, V.V.; Danziger, М.; Phiodorov, S. (Вопросы атомной науки и техники, 2000)

The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic ...

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Перегляд за автором "Sleptsov, V.V."

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Перегляд за автором "Sleptsov, V.V."

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